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Major Equipment and facilities
Solid State lab.
contains the following facilities which are available for user access.
Characterization
 2MV Tandem accelerator and ion beam
analysis / implantation facility
Ambient
scanning probe microscopes
UHV scanning
tunneling microscope
X-ray
diffractometers
Spreading
resistance profiler
9T VSM
IR
photoelastic measurement system
Spectroscopic
ellipsometery
Variable
Temperature Hall effect
HP Electrical Characterization Instruments
Probe
station
a-step profiler
Sample
Preparation
MOCVD reactor
Metal vapor
vacuum arc (MEVVA) ion implanter
3-Source RF/DC magnetron sputtering
system
Dual e-beam
deposition system
Thermal evaporation system
Rapid
temperature annealing (RTA)
TEM Sample
Preparation Machines
Reactive
plasma etcher
Photolithography
system
Wire bonder
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