Three
Sources magnetron Sputtering Facility
2" Two DC source and one RF source magnetron sputtering deposition system. The substrate stage is rotatable. A sample heater can be reached 3000C.
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Three
Sources magnetron Sputtering Facility 2" Two DC source and one RF source magnetron sputtering deposition system. The substrate stage is rotatable. A sample heater can be reached 3000C.
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